The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Jun. 12, 2013
Silex Microsystems Ab, Jarfalla, SE;
Peter Agren, Huddinge, SE;
SILEX MICROSYSTEMS AB, Jarfalla, SE;
Abstract
A semiconductor device, includes a semiconductor substrate () having a first () and a second () side. There is provided at least one via () extending through the substrate () having first () and second () end surfaces, the first end surface () constituting a transducer electrode for interacting with a movable element () arranged at the first side () of the substrate (). A shield () is provided on and covers at least part of the first side () of the substrate (), the shield/mask () including a conductive layer () and an insulating material layer () provided between the substrate () and the conductive layer (). The mask has an opening () exposing only a part of the first surface () of the via. Preferably the opening () in the mask is precisely aligned with the movable element, and the area of the opening is accurately defined.