The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
May. 17, 2013
Applicant:
Inficon, Inc., East Syracuse, NY (US);
Inventor:
Carl A. Gogol, Jr., Manlius, NY (US);
Assignee:
INFICON, INC., East Syracuse, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 27/28 (2006.01); G01N 29/24 (2006.01); H01L 41/047 (2006.01); H01L 41/053 (2006.01);
U.S. Cl.
CPC ...
G01N 29/2443 (2013.01); H01L 41/0475 (2013.01); H01L 41/053 (2013.01);
Abstract
A combination retainer and electrical contact mechanism for a deposition monitor sensor includes a sensor body and a removable flexible electrical contact spanning between a fixed electrical (contact) element in the sensor's body and one face of an associated monitor crystal. A retainer insulates or insures electrical isolation of the spanning electrical contact from unwanted contact to electrically grounded components in which at least one of the retainer and crystal holder include features that maintain the electrical contact with the retainer in order to provide a single mechanism.