The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2016

Filed:

Mar. 04, 2016
Applicant:

Nantero Inc., Woburn, MA (US);

Inventors:

Thomas Rueckes, Byfield, MA (US);

H. Montgomery Manning, Eagle, ID (US);

Rahul Sen, Jr., Lexington, MA (US);

Assignee:

Nantero Inc., Woburn, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/10 (2006.01); H01L 29/16 (2006.01); H01L 51/00 (2006.01); H01L 29/06 (2006.01); H01L 51/05 (2006.01); B82Y 10/00 (2011.01); H01L 21/02 (2006.01); H01L 29/10 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01L 51/107 (2013.01); B82Y 10/00 (2013.01); H01L 21/02527 (2013.01); H01L 21/02606 (2013.01); H01L 21/02628 (2013.01); H01L 29/0665 (2013.01); H01L 29/1606 (2013.01); H01L 51/0003 (2013.01); H01L 51/0048 (2013.01); H01L 51/0591 (2013.01); B82Y 40/00 (2013.01); H01L 21/02203 (2013.01); H01L 29/0669 (2013.01); H01L 29/1029 (2013.01); Y10S 977/842 (2013.01);
Abstract

Methods for passivating a nanotube fabric layer within a nanotube switching device to prevent or otherwise limit the encroachment of an adjacent material layer are disclosed. In some embodiments, a sacrificial material is implanted within a porous nanotube fabric layer to fill in the voids within the porous nanotube fabric layer while one or more other material layers are applied adjacent to the nanotube fabric layer. Once the other material layers are in place, the sacrificial material is removed. In other embodiments, a non-sacrificial filler material (selected and deposited in such a way as to not impair the switching function of the nanotube fabric layer) is used to form a barrier layer within a nanotube fabric layer. In other embodiments, individual nanotube elements are combined with and nanoscopic particles to limit the porosity of a nanotube fabric layer.


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