The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2016

Filed:

Oct. 28, 2011
Applicants:

Naoya Nishimura, Funabashi, JP;

Taku Kato, Funabashi, JP;

Yasuyuki Koide, Funabashi, JP;

Kei Yasui, Funabashi, JP;

Hideki Musashi, Funabashi, JP;

Masaaki Ozawa, Funabashi, JP;

Inventors:

Naoya Nishimura, Funabashi, JP;

Taku Kato, Funabashi, JP;

Yasuyuki Koide, Funabashi, JP;

Kei Yasui, Funabashi, JP;

Hideki Musashi, Funabashi, JP;

Masaaki Ozawa, Funabashi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C08G 67/02 (2006.01); H01L 31/0232 (2014.01); C08G 73/00 (2006.01); C08G 73/02 (2006.01); C08G 73/06 (2006.01); C08L 79/02 (2006.01); C08L 79/04 (2006.01); C09D 179/02 (2006.01); C09D 179/04 (2006.01); H01L 31/0216 (2014.01); C08K 5/00 (2006.01); C08K 5/09 (2006.01); C08K 5/16 (2006.01);
U.S. Cl.
CPC ...
H01L 31/0232 (2013.01); C08G 73/0273 (2013.01); C08G 73/0644 (2013.01); C08L 79/02 (2013.01); C08L 79/04 (2013.01); C09D 179/02 (2013.01); C09D 179/04 (2013.01); H01L 31/02168 (2013.01); H01L 31/02327 (2013.01); C08K 5/0008 (2013.01); C08K 5/09 (2013.01); C08K 5/16 (2013.01); Y02E 10/50 (2013.01);
Abstract

A film-forming composition is characterized by containing: a triazine ring-containing hyperbranched polymer containing a repeating unit structure represented by formula (1); and a dissolution-enhancing agent for breaking a hydrogen bond formed at least within the hyperbranched polymer and/or between molecules, between a nitrogen atom in the triazine ring, and a diarylamine-derived NH group. The film-forming composition has excellent dissolvability in organic solvents such as resist solvents, and has good handling and filtration properties at low viscosity. (In the formula, R and R' each independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group (however, at least one of R and R′ represents a hydrogen atom); and Ar represents a divalent organic group containing an aromatic ring and/or a heterocyclic ring).


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