The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2016

Filed:

Mar. 16, 2016
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Dong-Suk Shin, Yongin-si, KR;

Myung-Sun Kim, Hwaseong-si, KR;

Seong-Jin Nam, Seongnam-si, KR;

Pan-Kwi Park, Incheon, KR;

Hoi-Sung Chung, Hwaseong-si, KR;

Nae-In Lee, Seoul, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/417 (2006.01); H01L 29/66 (2006.01); H01L 29/08 (2006.01); H01L 29/165 (2006.01); H01L 21/8238 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 29/16 (2006.01); H01L 29/161 (2006.01); H01L 27/088 (2006.01); H01L 27/11 (2006.01); H01L 29/45 (2006.01); H01L 29/51 (2006.01); H01L 21/28 (2006.01); H01L 29/10 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7848 (2013.01); H01L 21/02532 (2013.01); H01L 21/02636 (2013.01); H01L 21/30604 (2013.01); H01L 21/823807 (2013.01); H01L 21/823814 (2013.01); H01L 27/088 (2013.01); H01L 27/1104 (2013.01); H01L 27/1116 (2013.01); H01L 29/0847 (2013.01); H01L 29/16 (2013.01); H01L 29/161 (2013.01); H01L 29/165 (2013.01); H01L 29/45 (2013.01); H01L 29/513 (2013.01); H01L 29/665 (2013.01); H01L 29/6653 (2013.01); H01L 29/6656 (2013.01); H01L 29/6659 (2013.01); H01L 29/66575 (2013.01); H01L 29/66636 (2013.01); H01L 29/7827 (2013.01); H01L 29/7834 (2013.01); H01L 21/28247 (2013.01); H01L 29/1083 (2013.01); H01L 29/785 (2013.01); H01L 29/78696 (2013.01);
Abstract

In a semiconductor device, a first active region has a first Σ-shape, and the second active region has a second Σ-shape. When a line that is perpendicular to the substrate and passes a side surface of a first gate electrode in the first region is defined as a first vertical line, when a line that is perpendicular to the substrate and passes a side surface of a second gate electrode in the second region is defined as a second vertical line, when a shortest distance between the first vertical line and the first trench is defined as a first horizontal distance, and when a shortest distance between the second vertical line and the second trench is defined as a second horizontal distance, a difference between the first horizontal distance and the second horizontal distance is equal to or less than 1 nm.


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