The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 2016

Filed:

Aug. 06, 2015
Applicant:

Excelliance Mos Corporation, Hsinchu County, TW;

Inventor:

Chu-Kuang Liu, Hsinchu County, TW;

Assignee:

Excelliance MOS Corporation, Hsinchu County, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/40 (2006.01); H01L 29/78 (2006.01); H01L 29/739 (2006.01); H01L 29/423 (2006.01); H01L 29/417 (2006.01); H01L 29/06 (2006.01); H01L 29/872 (2006.01);
U.S. Cl.
CPC ...
H01L 29/404 (2013.01); H01L 29/0661 (2013.01); H01L 29/407 (2013.01); H01L 29/41741 (2013.01); H01L 29/4236 (2013.01); H01L 29/7393 (2013.01); H01L 29/7397 (2013.01); H01L 29/7811 (2013.01); H01L 29/7813 (2013.01); H01L 29/7827 (2013.01); H01L 29/8725 (2013.01); H01L 29/41766 (2013.01);
Abstract

An edge terminal structure of a power semiconductor device includes a second conductive-type substrate, a first conductive-type buffer layer, a first conductive-type epitaxial layer, a first and a second electrodes, and a first and a second field plates. A trench is in a surface of the first conductive-type epitaxial layer in an edge terminal area beside an active area of the power semiconductor device. The first field plate includes at least a L-shaped electric-plate, a gate insulation layer under the L-shaped electric-plate, and the first electrode on the L-shaped electric-plate. The second field plate includes a portion of the first electrode and at least an insulation layer between the portion of the first electrode and the first conductive-type epitaxial layer. The insulation layer covers the tail of the trench and completely covers the L-shaped electric-plate.


Find Patent Forward Citations

Loading…