The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
May. 03, 2015
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Cornelis Sander Kooijman, Veldhoven, NL;
Jacob Simon Faber, Eindhoven, NL;
Assignee:
FEI COMPANY, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/28 (2006.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/265 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); H01J 2237/28 (2013.01);
Abstract
Methods and systems are provided for a scanning microscope to rapidly form a partial digital image of an area. The method includes performing an initial scan for the area and using initial scan to identify regions representing features of interest in the area. Then, the method performs additional adaptive scans of the regions representing structures of interest. Such scans adapt the path of the scanning beam to follow the edges of a feature of interest by performing localized scan patterns that intersect the feature edge, and directing the localized scan patterns to follow the feature edge.