The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Nov. 02, 2012
Asml Netherlands B.v., Veldhoven, NL;
Jan Frederik Hoogkamp, Breda, NL;
Bastiaan Stephanus Hendricus Jansen, Waalre, NL;
Maurice Willem Jozef Etiënne Wijckmans, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source (SO) suitable for providing a beam of radiation to an illuminator of a lithographic apparatus. The radiation source comprises a nozzle () configured to direct a stream of fuel droplets along a trajectory () towards a plasma formation location (). The radiation source is configured to receive a first amount of radiation () such that, in use, the first amount of radiation is incident on a fuel droplet at the plasma formation location. The first amount of radiation transfers energy to the fuel droplet to generate a radiation generating plasma that emits a second amount of radiation (). The radiation source further comprises an alignment detector having a first sensor arrangement () and a second sensor arrangement (). The first sensor arrangement is configured to measure a property of a third amount of radiation () that is indicative of a focus position of the first amount of radiation. The second sensor arrangement is configured to measure a property of a fourth amount of radiation (), the fourth amount of radiation being a portion of the first amount of radiation that is reflected by the fuel droplet upon which the first amount of radiation is incident.