The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
May. 12, 2016
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Inventors:
Naoki Yamashita, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Daiju Shiono, Kawasaki, JP;
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08F 30/04 (2006.01); C07F 7/00 (2006.01); C08G 18/22 (2006.01); C08F 4/12 (2006.01); C08F 4/06 (2006.01); C08F 4/16 (2006.01); C08F 299/04 (2006.01); G03F 7/004 (2006.01);
U.S. Cl.
CPC ...
C08F 30/04 (2013.01); C07F 7/006 (2013.01); C08F 4/06 (2013.01); C08F 4/12 (2013.01); C08F 4/16 (2013.01); C08G 18/222 (2013.01); C08F 299/0464 (2013.01); G03F 7/004 (2013.01);
Abstract
A negative resist composition including a complex represented by the general formula (1); and a polymerization initiator, in which M represents hafnium (Hf) or zirconium (Zr), X represents a ligand comprising a conjugate base of an acid which has an acid dissociation constant (pKa) of 3.8 or less and has a polymerizable group, Y represents a ligand having no polymerizable group, and n represents an integer of 1 to 4.[MXY]  (1)