The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9496432 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 15, 2016

Filed:

Nov. 23, 2012
Applicants:

Imec, Leuven, BE;

K.u.leuven R&d, B-Leuven, BE;

Excico Group NV, Hasselt, BE;

Inventors:

Loic Tous, Mespaul, FR;

Monica Aleman, Etterbeek, BE;

Joachim John, Freiburg, DE;

Thierry Emeraud, Hasselt, BE;

Assignees:

IMEC, Leuven, BE;

Katholieke Universiteit Leuven, Leuven, BE;

Excico Group NV, Hasselt, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0236 (2006.01); H01L 21/268 (2006.01); H01L 21/3205 (2006.01); H01L 31/0216 (2014.01); H01L 31/0224 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02366 (2013.01); H01L 21/268 (2013.01); H01L 21/32053 (2013.01); H01L 31/02168 (2013.01); H01L 31/022425 (2013.01); H01L 31/1864 (2013.01); Y02E 10/50 (2013.01); Y02P 70/521 (2015.11);
Abstract

The present invention is related to a method for forming a metal silicide layer on a textured silicon substrate surface. The method includes providing a metal layer on a textured silicon substrate and performing a pulsed laser annealing step providing at least one UV laser pulse with a laser fluence in the range between 0.1 J/cmand 1.5 J/cmand with a laser pulse duration in the range between 1 ns and 10 ms. Then, the method includes converting at least part of the metal layer into a metal silicide layer. In addition, the present invention is related to the use of such a method in a process for fabricating a photovoltaic cell, wherein the dielectric layer is a surface passivation layer, or wherein the dielectric layer is an antireflection coating.


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