The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Nov. 21, 2013
Chengdu Monolithic Power Systems Co., Ltd., Chengdu, CN;
Tiesheng Li, San Jose, CA (US);
Rongyao Ma, Chengdu, CN;
CHENGDU MONOLITHIC POWER SYSTEMS CO., LTD., Chengdu, CN;
Abstract
The present disclosure discloses a field effect transistor ('FET'), a termination structure and associated method for manufacturing. The termination structure for the FET includes a plurality of termination cells arranged substantially in parallel from an inner side toward an outer side of a termination area of the FET. Each of the termination cells comprises a termination trench and a guard ring region located underneath the bottom of the termination trench in the semiconductor layer. Each termination trench is lined with a termination insulation layer, and is filled with a first conductive spacer and a second conductive spacer respectively against an inner sidewall and an outer sidewall of the termination trench and spaced apart from each other with a space, and a dielectric layer filling the space between the first and the second spacers.