The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Nov. 18, 2015
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Naoki Yasuda, Yokohama, JP;
Masaru Kito, Kuwana, JP;
KABUSHIKI KAISHA TOSHIBA, Minato-ku, JP;
Abstract
A nonvolatile semiconductor storage device includes a plurality of electrode films stacked in a first direction; a silicon pillar piercing the stacked electrode films and separated therefrom by a block insulating film; a charge storage film provided between the block insulating film and the silicon pillar; and a tunnel insulating film provided between the charge storage film and the silicon pillar. The tunnel insulating film comprises a first insulating film having silicon oxide as a base material and containing an added element, wherein a density of the element increases from the silicon pillar toward the charge storage film.