The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Jun. 18, 2013
International Business Machines Corporation, Armonk, NY (US);
Ward A. Johnson, Colchester, VT (US);
Jenifer E. Lary, Hinesburg, VT (US);
Anthony K. Stamper, Williston, VT (US);
Kimball M. Watson, Essex Junction, VT (US);
Pui L. Yee, Essex Junction, VT (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and usage, and design structures are disclosed herein. The method includes applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition. The method further includes applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition.