The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Jan. 27, 2015
Nuflare Technology, Inc., Yokohama, JP;
Toshiyuki Watanabe, Kanagawa, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
A mask inspection apparatus including, a driving unit configured to drive a stage holding an inspection target mask, in which a pattern is formed, or a calibration mask, a light irradiation device configured to irradiate light on the inspection target mask or the calibration mask, an image sensor configured to detect a light quantity signal of transmitted light or reflected light of the inspection target mask or the calibration mask at a plurality of pixels. A sensor amplifier configured to amplify an output of the image sensor with respect to each pixel, generates an optical image, and normalizes a gain and an offset of signal amplitude, wherein at a first setting the sensor amplifier sets the gain and the offset using the calibration mask, and at a second setting the sensor amplifier sets the gain and offset of the inspection target mask based on the first setting.