The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Sep. 19, 2012
Asml Netherlands B.v., Veldhoven, NL;
Sebastiaan Maria Johannes Cornelissen, Eindhoven, NL;
Noud Jan Gilissen, 's-Gravenzande, NL;
Anko Jozef Cornelus Sijben, Veghel, NL;
Roger Wilhelmus Antonius Henricus Schmitz, Helmond, NL;
Arnoud Willem Notenboom, Rosmalen, NL;
Ronald Van Der Wilk, Knegsel, NL;
Manon Elise Will, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A chuck, chuck control system, lithographic apparatus and method of using a chuck are disclosed. In an embodiment, there is provided a chuck () for use in holding a patterning device (MA) or a substrate (W) onto a supporting table (MT, WT) of a lithography apparatus () by electrostatic force, in which the patterning device is for imparting a radiation beam (B) with a pattern in its cross-section to form a patterned radiation beam, and the substrate is for receiving the patterned radiation beam; said chuck comprising: a dielectric member (); a temperature conditioning fluid channel () formed within the chuck; a drive electrode () for applying a potential difference between the drive electrode and the patterning device or substrate across the dielectric member in order to electrostatically attract the patterning device or substrate towards the drive electrode; and a first shield electrode () for reducing or preventing the development of an electric field across temperature conditioning fluid in the temperature conditioning fluid channel due to a voltage applied to the drive electrode, in order to reduce or prevent electrolysis in the fluid.