The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Dec. 16, 2011
Tsuyoshi Kurosawa, Kawasaki, JP;
Kotaro Endo, Kawasaki, JP;
Yuichi Suzuki, Kawasaki, JP;
Yuta Iwasawa, Kawasaki, JP;
Tsuyoshi Kurosawa, Kawasaki, JP;
Kotaro Endo, Kawasaki, JP;
Yuichi Suzuki, Kawasaki, JP;
Yuta Iwasawa, Kawasaki, JP;
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Abstract
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under the action of acid, an acid generator component (B) which generates acid upon exposure, and a nitrogen-containing organic compound component (D), wherein the acid generator component (B) includes an acid generator (B1) containing a compound represented by general formula (b1-1) shown below, and the nitrogen-containing organic compound component (D) includes a compound (D1) represented by general formula (d1) shown below. In the formula, Yrepresents an alkylene group of 1 to 4 carbon atoms which may have a substituent, Rrepresents an alkyl group, alkoxy group, halogen atom, halogenated alkyl group, hydroxyl group or oxygen atom (═O), p represents 0 or 1, and Zrepresents an organic cation.