The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Nov. 11, 2015
Disco Corporation, Tokyo, JP;
Chikara Aihara, Tokyo, JP;
Tomohiro Endo, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A method of detecting a transmission laser beam is disclosed. A laser beam of a wavelength having a transparency to a plate-shaped workpiece having a first face and a second face is irradiated upon the workpiece from the first face side with a focal point of the laser beam positioned in the inside of the workpiece. The laser beam is detected after it has passed through the workpiece to the second face side. A photosensitive sheet is positioned to hold the workpiece on a holding face of a chuck table. A photosensitive layer between the sheet and the workpiece is opposed to the second face of the workpiece. The laser beam is irradiated from the first face side of the workpiece, and the state of the transmission laser beam from a photosensitive reaction region formed in the photosensitive layer of the photosensitive sheet is confirmed.