The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2016
Filed:
Jul. 22, 2015
Mapper Lithography Ip B.v., Delft, NL;
Pieter Kruit, Delft, NL;
Marc Smits, Pijnacker, NL;
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Abstract
The invention relates to an arrangement for transporting radicals. An electron beam system is presented comprising a beamlet generator; a beamlet manipulator () comprising an array of apertures; a plasma generator comprising a chamber for forming a plasma, an inlet receiving input gas and outlets removing plasma or radicals created therein, the plasma generator further comprising outlets in flow connection with the plasma chamber outlets; and a hollow guiding body () guiding radicals formed in the plasma towards the array of apertures for removing contaminant deposition. The hollow guiding body () is removably connectable to an extended portion () of the plasma generator outlet. A cover () can be placed over a connection between the hollow guiding body () and the extended portion (). The extended portion () of the plasma generator outlet and the hollow guiding body () can be similarly formed as a slit.