The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2016
Filed:
Jan. 21, 2014
Applicant:
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Inventors:
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/147 (2006.01); H01J 37/153 (2006.01); H01J 37/28 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/1478 (2013.01); H01J 37/147 (2013.01); H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 37/22 (2013.01); H01J 37/222 (2013.01); H01J 2237/1506 (2013.01); H01J 2237/1507 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2806 (2013.01);
Abstract
There is provided a charged particle beam apparatus that includes a trajectory monitoring unit which is disposed above an objective lens () and which includes an optical element () having a lens action and a trajectory correcting deflector (). An applied voltage and an excitation current of the optical element () are set to zero after a trajectory correction of a primary charged particle beam (). Accordingly, the lens action and an aberration of the optical element () have no influence on resolution.