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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9484181 B1

PDFFull Text
Date of Patent:
Nov. 01, 2016

Filed:

Jan. 21, 2014

Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus

Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventors:

Hideto Dohi, Tokyo, JP;

Akira Ikegami, Tokyo, JP;

Hideyuki Kazumi, Tokyo, JP;

Assignee:

Hitachi High-Technologies Corporation, Tokyo, JP;

Attorney:

Crowell & Moring LLP

Primary Examiner:

Jack Berman

Int. Cl.
CPC ...
H01J 37/147 (2006.01); H01J 37/153 (2006.01); H01J 37/28 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/1478 (2013.01); H01J 37/147 (2013.01); H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 37/22 (2013.01); H01J 37/222 (2013.01); H01J 2237/1506 (2013.01); H01J 2237/1507 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2806 (2013.01);
Abstract

There is provided a charged particle beam apparatus that includes a trajectory monitoring unit which is disposed above an objective lens () and which includes an optical element () having a lens action and a trajectory correcting deflector (). An applied voltage and an excitation current of the optical element () are set to zero after a trajectory correction of a primary charged particle beam (). Accordingly, the lens action and an aberration of the optical element () have no influence on resolution.

Find Patent Forward Citations

Dohi, Hideto. (2016). Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus (U.S. Patent No. 9484181). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9484181

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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