The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2016
Filed:
Sep. 14, 2006
David Malcolm Camm, Vancouver, CA;
Sergiy Dets, Richmond, CA;
Kevin Mcdonnell, Burnaby, CA;
Greg Stuart, Burnaby, CA;
Tilman Thrum, Richmond, CA;
Igor Rudic, Vancouver, CA;
Ljubomir Kaludjercic, Vancouver, CA;
David Malcolm Camm, Vancouver, CA;
Sergiy Dets, Richmond, CA;
Kevin McDonnell, Burnaby, CA;
Greg Stuart, Burnaby, CA;
Tilman Thrum, Richmond, CA;
Igor Rudic, Vancouver, CA;
Ljubomir Kaludjercic, Vancouver, CA;
Mattson Technology, Inc., Fremont, CA (US);
Abstract
A first heat-treating method involves monitoring at least one thermal efficiency parameter associated with an irradiance system configured to produce an irradiance flash incident on a surface of a workpiece, and automatically updating control information used by the irradiance system to produce the irradiance flash, in response to the monitoring of the thermal efficiency parameter. A second method involves predicting a heating effect of an irradiance flash to be incident upon a surface of a workpiece, in response to a measurement of a heating parameter of the surface, and pre-adjusting the irradiance flash, in response to the predicted heating effect. A third method involves measuring a temperature of a surface of a workpiece during an initial portion of an irradiance flash incident on the surface, and controlling a power of a remaining portion of the irradiance flash, in response to the temperature.