The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2016
Filed:
Sep. 13, 2013
Applicant:
Ekc Technology, Inc., Hayward, CA (US);
Inventors:
Atsushi Otake, Tokyo, JP;
Akira Kuroda, Kanagawa, JP;
Assignee:
EKC TECHNOLOGY INC, , CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/00 (2006.01); H01L 21/02 (2006.01); C11D 7/32 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
C11D 3/0073 (2013.01); C11D 7/3218 (2013.01); C11D 7/3281 (2013.01); C11D 11/0047 (2013.01); H01L 21/02068 (2013.01); H01L 21/02074 (2013.01);
Abstract
An aqueous cleaning composition and method for post-CMP cleaning of a semiconductor device which contains a copper interconnect wherein the cleaning composition contains (A) N,N,N'-trimethyl-N′-(2-hydroxyethyl)ethylenediamine; and (B) at least one corrosion inhibitor selected from the group consisting essentially of uric acid, xanthine, theophyline, paraxanthine, theobromine, caffeine, guanine, hypoxanthine, adenine, and combinations thereof.