The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 25, 2016

Filed:

Aug. 25, 2011
Applicants:

Roberto C. Myers, Columbus, OH (US);

Siddharth Rajan, Columbus, OH (US);

Inventors:

Roberto C. Myers, Columbus, OH (US);

Siddharth Rajan, Columbus, OH (US);

Assignee:

THE OHIO STATE UNIVERSITY, Columbus, OH (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 33/04 (2010.01); B82Y 10/00 (2011.01); B82Y 30/00 (2011.01); H01L 21/02 (2006.01); H01L 29/06 (2006.01); H01L 29/12 (2006.01); H01L 29/15 (2006.01); H01L 29/205 (2006.01); H01L 29/66 (2006.01); H01L 29/775 (2006.01); H01L 29/861 (2006.01); H01L 31/0352 (2006.01); H01L 31/065 (2012.01); H01L 31/109 (2006.01); H01L 31/18 (2006.01); H01L 33/18 (2010.01); H01L 29/20 (2006.01); H01L 33/08 (2010.01); H01L 33/32 (2010.01); B82Y 20/00 (2011.01);
U.S. Cl.
CPC ...
H01L 33/04 (2013.01); B82Y 10/00 (2013.01); B82Y 30/00 (2013.01); H01L 21/0251 (2013.01); H01L 21/0254 (2013.01); H01L 21/02458 (2013.01); H01L 21/02573 (2013.01); H01L 21/02603 (2013.01); H01L 21/02636 (2013.01); H01L 29/068 (2013.01); H01L 29/0673 (2013.01); H01L 29/0676 (2013.01); H01L 29/122 (2013.01); H01L 29/15 (2013.01); H01L 29/205 (2013.01); H01L 29/66469 (2013.01); H01L 29/775 (2013.01); H01L 29/861 (2013.01); H01L 31/03529 (2013.01); H01L 31/035227 (2013.01); H01L 31/065 (2013.01); H01L 31/109 (2013.01); H01L 31/1848 (2013.01); H01L 31/1852 (2013.01); H01L 33/18 (2013.01); B82Y 20/00 (2013.01); H01L 29/2003 (2013.01); H01L 33/08 (2013.01); H01L 33/32 (2013.01); H01L 2924/0002 (2013.01); Y02E 10/544 (2013.01);
Abstract

A nanowire comprises a polar semiconductor material that is compositionally graded along the nanowire from a first end to a second end to define a polarization doping profile along the nanowire from the first end to the second end. The polar semiconductor material may comprise a group IH-nitride semiconductor, such as an alloy of GaN and AlN, or an alloy of GaN and InN. Such nanowires may be formed by nucleating the first ends on a substrate, growing the nanowires by depositing polar semiconductor material on the nucleated first ends on a selected growth face, and compositionally grading the nanowires during growth to impart the polarization doping. The direction of the compositional grading may be reversed during the growing of the nanowires to reverse the type of the imparted polarization doping. In some embodiments, the reversing forms n/p or p/n junctions in the nanowires.


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