The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Jul. 13, 2012
Pascal Gustaaf Vermont, Almere, NL;
Wilhelmus Gerardus Van Velzen, Almere, NL;
Vladimir Ivanovich Kuznetsov, Almere, NL;
Ernst Hendrik August Granneman, Almere, NL;
Gonzalo Felipe Ramirez Troxler, Almere, NL;
Pascal Gustaaf Vermont, Almere, NL;
Wilhelmus Gerardus Van Velzen, Almere, NL;
Vladimir Ivanovich Kuznetsov, Almere, NL;
Ernst Hendrik August Granneman, Almere, NL;
Gonzalo Felipe Ramirez Troxler, Almere, NL;
ASM INTERNATIONAL N.V., Almere, NL;
Abstract
Disclosed is a process tunnel () through which substrates () may be transported in a floating condition between two gas bearings (). To monitor the transport of the substrates through the process tunnel, the upper and lower walls () of the tunnel are fitted with at least one substrate detection sensor (S, . . . , S) at a respective substrate detection sensor location, said substrate detection sensor being configured to generate a reference signal reflecting a presence of a substrate between said first and second walls near and/or at said substrate detection sensor location. Also provided is a monitoring and control unit () that is operably connected to the at least one substrate detection sensor (S, . . . , S), and that is configured to record said reference signal as a function of time and to process said reference signal.