The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Apr. 14, 2006
Nicolaas Rudolf Kemper, Eindhoven, NL;
Marcel Beckers, Eindhoven, NL;
Stefan Philip Christiaan Belfroid, Delft, NL;
Ferdy Migchelbrink, Veldhoven, NL;
Sergei Shulepov, Eindhoven, NL;
Nicolaas Rudolf Kemper, Eindhoven, NL;
Marcel Beckers, Eindhoven, NL;
Stefan Philip Christiaan Belfroid, Delft, NL;
Ferdy Migchelbrink, Veldhoven, NL;
Sergei Shulepov, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A plurality of extraction conduits are provided to remove immersion liquid into a chamber. The extraction conduits are arranged at different distances from a target portion of the substrate. From the chamber, a passage is provided to which a suction force is applied. When all the conduits are filled with immersion liquid, the extraction capacity will be greater than when one or more of the conduits comprise gas.