The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Dec. 09, 2014
Qualcomm Mems Technologies, Inc., San Diego, CA (US);
John Hyunchul Hong, San Clemente, CA (US);
Jian Jim Ma, Carlsbad, CA (US);
Bing Wen, Poway, CA (US);
Tallis Young Chang, San Diego, CA (US);
Edward Keat Leem Chan, San Diego, CA (US);
Brandon John Hong, San Clemente, CA (US);
Kristopher Andrew Lavery, Pleasanton, CA (US);
Yaoling Pan, San Diego, CA (US);
Cheonhong Kim, San Diego, CA (US);
QUALCOMM MEMS Technologies, Inc., San Diego, CA (US);
Abstract
This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap.