The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2016
Filed:
Oct. 28, 2014
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Yukio Morishige, Tokyo, JP;
Kuniaki Iwashiro, Tokyo, JP;
Assignee:
Disco Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/53 (2014.01); B23K 26/40 (2014.01); B23K 26/06 (2014.01); B23K 26/08 (2014.01); B23K 26/00 (2014.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
B23K 26/4075 (2013.01); B23K 26/0006 (2013.01); B23K 26/0057 (2013.01); B23K 26/0643 (2013.01); B23K 26/083 (2013.01); B23K 26/0853 (2013.01); B23K 26/53 (2015.10); B23K 2203/56 (2015.10); H01L 21/78 (2013.01);
Abstract
The present invention provides a laser processing method in which a modified layer is formed inside a workpiece by irradiating the workpiece with a laser beam having such a wavelength as to be transmitted through the workpiece with the focal point of the laser beam positioned inside the workpiece. In the laser processing method, the spectral line width of the laser beam is set equal to or smaller than 10 pm.