The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Jun. 08, 2015
Applicant:
Spts Technologies Limited, Newport, GB;
Inventors:
Katherine Crook, Gloucestershire, GB;
Stephen R Burgess, Ebbw Vale, GB;
Assignee:
SPTS TECHNOLOGIES LIMITED, Newport, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/70 (2006.01); H01L 49/02 (2006.01); H01L 21/02 (2006.01); C23C 14/10 (2006.01); H01L 23/31 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 28/40 (2013.01); C23C 14/10 (2013.01); H01L 21/02118 (2013.01); H01L 21/02164 (2013.01); H01L 21/02214 (2013.01); H01L 21/02274 (2013.01); H01L 23/3192 (2013.01); H01L 23/562 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A substrate having a dielectric film thereon, in which: the dielectric film comprises at least four stacked layers of a dielectric material; the stacked layers comprise compressive layers which are subject to a compressive stress, and tensile layers which are subject to a tensile stress; and there are at least two spaced apart tensile layers which are each adjacent to one or more compressive layers.