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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9472444 B1

PDFFull Text
Expired
Date of Patent:
Oct. 18, 2016

Filed:

Aug. 23, 2012

Wafer support device

Applicants:

Tien-chih Cheng, Zhubei, TW;

Ying Zhang, Hsinchu, TW;

Shu-huei Suen, Zhudong Township, Hsinchu County, TW;

Chen-chiao Kao, New Taipei, TW;

Inventors:

Tien-Chih Cheng, Zhubei, TW;

Ying Zhang, Hsinchu, TW;

Shu-Huei Suen, Zhudong Township, Hsinchu County, TW;

Chen-Chiao Kao, New Taipei, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;

Attorney:

McDermott Will & Emery LLP

Primary Examiner:

Dah-Wei D Yuan

Assistant Examiner:

Kristen A Dagenais

Int. Cl.
CPC ...
B05C 13/00 (2006.01); B23B 31/28 (2006.01); B05D 1/02 (2006.01); B05C 11/00 (2006.01); B05D 3/12 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6875 (2013.01); H01L 21/68757 (2013.01); Y10T 279/23 (2015.01);
Abstract

A wafer support device is provided. The wafer support device includes a plurality of support portions; and a bottom area located among the support portions, wherein the bottom area has a protective layer formed thereon. A method for processing a working surface of a wafer support device is also provided.

Find Patent Forward Citations

Cheng, Tien-Chih. (2016). Wafer support device (U.S. Patent No. 9472444). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9472444

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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