The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2016

Filed:

Sep. 01, 2015
Applicant:

Zhen Ding Technology Co., Ltd., Tayuan, Taoyuan, TW;

Inventor:

Wei-Shuo Su, Taoyuan, TW;

Assignee:

Zhen Ding Technology Co., Ltd., Tayuan, Taoyuan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); H01L 21/768 (2006.01); H01L 23/498 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/4853 (2013.01); H01L 21/4828 (2013.01); H01L 21/4857 (2013.01); H01L 21/6835 (2013.01); H01L 21/76879 (2013.01); H01L 23/49822 (2013.01); H01L 2221/68318 (2013.01); H01L 2221/68345 (2013.01); H01L 2221/68377 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A method for manufacturing a packaging substrate includes: patterning a first photo-resisting layer having first openings on a copper foil layer to expose portions of the copper foil layer; patterning a removable second photo-resisting layer having second openings on the first photo-resisting layer to expose the first openings; filling copper into the first and second openings to form base portions and a first wiring layer; orderly forming a first dielectric layer and a second wiring layer on the first wiring layer; patterning a removable third photo-resisting layer comprising covering portions opposite to the base portions on the copper foil layer; and etching the copper foil layer to form protruding portions connected to and corresponding to the base portions to define a copper pillar bump, a size of the copper pillar bump gradually increasing from the protruding portions to the base portions.


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