The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Nov. 27, 2012
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Theodorus Petrus Maria Cadee, Asten, NL;
Koen Jacobus Johannes Maria Zaal, Eindhoven, NL;
Harmeet Singh, Fremont, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); H01L 21/683 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03B 27/58 (2013.01); G03F 7/2051 (2013.01); G03F 7/707 (2013.01); G03F 7/70708 (2013.01); H01L 21/683 (2013.01);
Abstract
A support for an object, e.g., a semiconductor substrate, includes a main body having a surface configured and arranged to have a plurality of projections. Each of the projections has an associated electrostatic actuator for displacing a free end of the associated projection relative to the main body at least in a direction in a plane parallel to a main surface of the object.