The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Jan. 17, 2013
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 11/00 (2006.01); B05B 15/02 (2006.01); B05C 5/02 (2006.01); B08B 1/00 (2006.01); B41J 2/165 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B05C 11/00 (2013.01); B05B 15/025 (2013.01); B05B 15/0208 (2013.01); B05B 15/0275 (2013.01); B05C 5/0254 (2013.01); B08B 1/006 (2013.01); B41J 2/16517 (2013.01); B41J 2/16535 (2013.01); H01L 21/67051 (2013.01);
Abstract
A wiping pad includes: a scraping edge provided to cross a long side direction of a discharge port and come into contact with the discharge port and nozzle side surfaces, and a lead-out passage provided ahead of the scraping edge in a moving direction along a nozzle long side direction to drain a treatment solution scraped away with the scraping edge, wherein the lead-out passage is a V-shaped groove formed along the moving direction on a pad upper surface side, and the V-shaped groove has the scraping edge formed at a rear end edge portion thereof and is formed to gradually increase in groove width and depth toward a front thereof from the scraping edge.