The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 18, 2016

Filed:

Dec. 07, 2015
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

Shaun M. Wilson, Trumbull, CT (US);

Edward A. Sturm, New Milford, CT (US);

Assignee:

ENTEGRIS, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/02 (2006.01); B01J 20/20 (2006.01); F17C 11/00 (2006.01); B01J 20/30 (2006.01); B01J 20/28 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
B01J 20/20 (2013.01); B01D 53/02 (2013.01); B01J 20/2808 (2013.01); B01J 20/28011 (2013.01); B01J 20/28016 (2013.01); B01J 20/28042 (2013.01); B01J 20/28078 (2013.01); B01J 20/28083 (2013.01); B01J 20/3078 (2013.01); C23C 16/4405 (2013.01); F17C 11/00 (2013.01); B01D 2253/102 (2013.01); B01D 2253/202 (2013.01); B01D 2256/18 (2013.01); B01D 2257/204 (2013.01); B01D 2257/2027 (2013.01); B01D 2257/2047 (2013.01); B01D 2257/40 (2013.01); Y02C 20/10 (2013.01); Y10T 137/0318 (2015.04); Y10T 137/8593 (2015.04);
Abstract

A polyvinylidene fluoride (PVDF) pyrolyzate adsorbent is described, having utility for storing gases in an adsorbed state, and from which adsorbed gas may be desorbed to supply same for use. The PVDF pyrolyzate adsorbent can be of monolithic unitary form, or in a bead, powder, film, particulate or other finely divided form. The adsorbent is particularly suited for storage and supply of fluorine-containing gases, such as fluorine gas, nitrogen trifluoride, carbo-fluoride gases, and the like. The adsorbent may be utilized in a gas storage and dispensing system, in which the adsorbent is contained in a supply vessel, from which sorbate gas can be selectively dispensed.


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