The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Sep. 30, 2013
Entegris, Inc., Billerica, MA (US);
Marc Laverdiere, Wakefield, MA (US);
Hirokazu Kuwabara, Fuchu, JP;
Koichi Kurata, Yonezawa, JP;
John P. Puglia, Townsend, MA (US);
Ben Mai Pak Lee, Pelham, NH (US);
Louis Barrows, Jr., Billerica, MA (US);
Kalyan Madhavaram, Lowell, MA (US);
Dmitri Menn, Marblehead, MA (US);
J. Karl Niermeyer, Tyngsborough, MA (US);
Craig Wallace Martland, Salem, NH (US);
Entegris, Inc., Billerica, MA (US);
Abstract
The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.