The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2016
Filed:
Mar. 07, 2011
Masami Miyake, Naka-gun, JP;
Kazuki Mizushima, Saitama, JP;
Wataru Saiki, Hitachinaka, JP;
Naoya Murakami, Naka-gun, JP;
Masami Miyake, Naka-gun, JP;
Kazuki Mizushima, Saitama, JP;
Wataru Saiki, Hitachinaka, JP;
Naoya Murakami, Naka-gun, JP;
MITSUBISHI MATERIALS CORPORATION, Tokyo, JP;
Abstract
An apparatus for producing trichlorosilane from raw gas containing silicon tetrachloride and hydrogen, having: a reaction chamber being supplied with the raw gas for generating reacted gas containing trichlorosilane and hydrogen; a plurality of heaters heating the raw gas and having exothermic portions being disposed along a vertical direction in the reaction chamber; a plurality of electrodes being connected to basal portions of the heaters; and a radiation plate being disposed between the exothermic portions of the heaters.