The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2016
Filed:
Jun. 19, 2012
Makoto Kobayashi, Oshu, JP;
Kenichi Yamaga, Oshu, JP;
Akira Sasaki, Tokyo, JP;
Daisuke Ikeda, Tokyo, JP;
Takahiro Koike, Tokyo, JP;
Makoto Kobayashi, Oshu, JP;
Kenichi Yamaga, Oshu, JP;
Akira Sasaki, Tokyo, JP;
Daisuke Ikeda, Tokyo, JP;
Takahiro Koike, Tokyo, JP;
NICHIAS CORPORATION, Tokyo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A heat treatment furnace includes: a processing vessel configured to accommodate therein at least one object to be processed; a cylindrical heat insulating member covering a periphery of the processing vessel; and a heater disposed along an inner circumferential surface of the heat insulating member. The heater includes strip-shaped corrugated heater elements disposed along the inner circumferential surface of the heat insulating member, each of the heater elements having valley portions protruding outward and mountain portions protruding inward.