The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2016
Filed:
Sep. 26, 2014
Ulvac, Inc., Kanagawa, JP;
Masahisa Ueda, Susono, JP;
Takashi Kurimoto, Susono, JP;
Kyuzo Nakamura, Chigasaki, JP;
Koukou Suu, Susono, JP;
Toshiya Yogo, Kasugai, JP;
Kazushige Komatsu, Kasugai, JP;
Nobusuke Tachibana, Kasugai, JP;
ULVAC, INC., Kanagawa, JP;
Abstract
An ashing device that prevents the ashing rate from changing over time. The ashing device ashes organic material on a substrate including an exposed metal in a processing chamber. The ashing device includes a path, which is formed in the processing chamber and through which active species supplied to the processing chamber pass. The path is defined by a surface on which the metal scattered from the substrate by the active species is collectible, with the surface being formed so as to expose a metal that is of the same kind.