The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2016
Filed:
Dec. 15, 2015
Nuflare Technology, Inc., Yokohama-shi, JP;
Osamu Iizuka, Yokohama, JP;
Kenji Ohtoshi, Kawasaki, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
According to one aspect of the present invention, a rotation angle measuring method of a multi-charged particle beam image includes two-dimensionally scanning a mark arranged on a stage in a multi-charged particle beam writing apparatus using, among multi-charged particle beams that can be used for exposure, a plurality of representative beams of which number is smaller than the number of beams constituting the multi-charged particle beams, creating a two-dimensional image of the plurality of representative beams based on signals obtained by two-dimensional scanning, and acquiring a rotation angle of the multi-charged particle beam image using the two-dimensional image.