The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2016
Filed:
Aug. 14, 2014
Applicant:
Cabot Microelectronics Corporation, Aurora, IL (US);
Inventors:
Robert Vacassy, Aurora, IL (US);
George Fotou, Aurora, IL (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/24 (2012.01); B24B 37/22 (2012.01); B24B 37/04 (2012.01); C08J 9/00 (2006.01); H01L 21/306 (2006.01); C08J 9/12 (2006.01);
U.S. Cl.
CPC ...
B24B 37/24 (2013.01); B24B 37/042 (2013.01); B24B 37/22 (2013.01); C08J 9/122 (2013.01); C08J 2201/032 (2013.01); C08J 2203/06 (2013.01); C08J 2205/044 (2013.01); C08J 2205/052 (2013.01); C08J 2207/00 (2013.01); C08J 2300/22 (2013.01); C08J 2300/26 (2013.01); C08J 2375/04 (2013.01);
Abstract
Disclosed is a polishing pad for chemical-mechanical polishing. The polishing pad has a porous interface and a substantially non-porous bulk core. Also disclosed are related apparatus and methods for using and preparing the polishing pad.