The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Feb. 21, 2014
Applicant:
Tera Xtal Technology Corporation, Hsinchu, TW;
Inventors:
Jun-Wen Chung, Hsinchu, TW;
Tzu-Hsuan Dai, Hsinchu, TW;
Wen-Yen Shen, Hsinchu, TW;
Kuang-Ling Wei, Hsinchu, TW;
Chuan-Lang Lu, Hsinchu, TW;
Assignee:
TERA XTAL TECHNOLOGY CORPORATION, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 53/017 (2012.01); B24D 18/00 (2006.01); B24B 53/053 (2006.01); B24B 53/02 (2012.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01); B24B 53/02 (2013.01); B24B 53/053 (2013.01); B24D 18/00 (2013.01);
Abstract
A pad conditioning tool includes a sapphire chip having a side surface defining a polishing surface and a plurality of sapphire grains formed on the polishing surface in an integral manner. Each of the sapphire grains had a three-dimensional geometric structure. The sapphire grains are arranged on the polishing surface in a specific form so as to possess a specific pattern.