The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2016
Filed:
Jan. 17, 2013
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Yurii A. Vlasov, Katonah, NY (US);
Fengnian Xia, Plainsboro, NJ (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02F 1/025 (2006.01); G02F 1/00 (2006.01); G02F 1/01 (2006.01); G02F 1/017 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 33/0054 (2013.01); G02F 1/011 (2013.01); G02F 1/0102 (2013.01); G02F 1/025 (2013.01); G02F 1/0018 (2013.01); G02F 1/0081 (2013.01); G02F 1/01708 (2013.01); G02F 2202/103 (2013.01); G02F 2202/104 (2013.01); G02F 2202/105 (2013.01);
Abstract
The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.