The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2016

Filed:

Sep. 09, 2014
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventors:

Wing-Chor Chan, Hsinchu, TW;

Ying-Chieh Tsai, Chiayi, TW;

Jeng Gong, Taichung, TW;

Chia-Hui Cheng, Kaohsiung, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/764 (2006.01); H01L 29/739 (2006.01); H01L 29/861 (2006.01); H01L 21/761 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7394 (2013.01); H01L 21/761 (2013.01); H01L 21/764 (2013.01); H01L 21/76254 (2013.01); H01L 29/0646 (2013.01); H01L 29/861 (2013.01); H01L 29/8611 (2013.01); H01L 29/0649 (2013.01);
Abstract

A high voltage (HV) device and method for manufacturing the same are provided, at least comprising a substrate, an insulation formed on the substrate, a deep well formed in the insulation, an air layer formed in the insulation and disposed adjacent to the bottom surface of the deep well. A bottom surface of the deep well is spaced apart from the substrate. Also, the air layer, interposed between the deep well and the substrate, is spaced apart from the substrate. In one embodiment, an air layer further communicates with an atmosphere outside the HV device, which facilitates heat dissipation.


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