The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2016
Filed:
Dec. 22, 2014
Applicant:
Mapper Lithography Ip B.v, Delft, NL;
Inventors:
Laura Dinu-Gürtler, Delft, NL;
Eric Petrus Hogervorst, Haarlem, NL;
Assignee:
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 29/04 (2006.01); H01J 1/15 (2006.01); G03F 7/20 (2006.01); H01J 37/075 (2006.01); H01J 37/317 (2006.01); H01J 1/28 (2006.01); H01J 3/02 (2006.01);
U.S. Cl.
CPC ...
H01J 1/15 (2013.01); G03F 7/70058 (2013.01); H01J 1/28 (2013.01); H01J 3/027 (2013.01); H01J 3/029 (2013.01); H01J 37/075 (2013.01); H01J 37/3174 (2013.01); H01J 37/3177 (2013.01); H01J 2229/481 (2013.01); H01J 2237/061 (2013.01);
Abstract
The invention relates to a cathode arrangement comprising: