The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2016
Filed:
Jun. 30, 2011
Masaru Hori, Nagoya, JP;
Hiroyuki Kano, Miyoshi, JP;
Kazuaki Mori, Anjyo, JP;
Nobuyuki Nakane, Toyota, JP;
Toshimitsu Watanabe, Chiryu, JP;
Joji Isozumi, Nagakute, JP;
Masaru Hori, Nagoya, JP;
Hiroyuki Kano, Miyoshi, JP;
Kazuaki Mori, Anjyo, JP;
Nobuyuki Nakane, Toyota, JP;
Toshimitsu Watanabe, Chiryu, JP;
Joji Isozumi, Nagakute, JP;
FUJI MACHINE MFG. CO., LTD., Chiryu-shi, JP;
NAGOYA UNIVERSITY, Nagoya, JP;
Abstract
A reactive-species supply device is configured to supply a treatment gas to an electric discharge space that is formed by at least one pair of electrodes, for thereby supplying at least a reactive species formed in a plasma, to an object through a reactive-species output port. The reactive-species supply device includes (a) a reactive-species outlet passage disposed between the electric discharge space and the reactive-species output port and (b) an earth ground member disposed in a portion of the reactive-species outlet passage. The portion of the reactive-species outlet passage is distant, by a given distance, from the reactive-species output port. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.