The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2016

Filed:

Oct. 15, 2014
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Inventors:

Sho Kato, Kanagawa, JP;

Yoshikazu Hiura, Kanagawa, JP;

Akihisa Shimomura, Kanagawa, JP;

Takashi Ohtsuki, Kanagawa, JP;

Satoshi Toriumi, Kanagawa, JP;

Yasuyuki Arai, Kanagawa, JP;

Assignee:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/077 (2012.01); H01L 31/20 (2006.01); H01L 21/02 (2006.01); H01L 31/036 (2006.01); H01L 31/0376 (2006.01); H01L 31/075 (2012.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 31/077 (2013.01); H01L 21/0237 (2013.01); H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); H01L 21/02636 (2013.01); H01L 31/036 (2013.01); H01L 31/0376 (2013.01); H01L 31/075 (2013.01); H01L 31/1804 (2013.01); H01L 31/20 (2013.01); Y02E 10/547 (2013.01); Y02E 10/548 (2013.01); Y02P 70/521 (2015.11);
Abstract

An object is to increase conversion efficiency of a photoelectric conversion device without increase in the manufacturing steps. The photoelectric conversion device includes a first semiconductor layer formed using a single crystal semiconductor having one conductivity type which is formed over a supporting substrate, a buffer layer including a single crystal region and an amorphous region, a second semiconductor layer which includes a single crystal region and an amorphous region and is provided over the butler layer, and a third semiconductor layer having a conductivity type opposite to the one conductivity type, which is provided over the second semiconductor layer. A proportion of the single crystal region is higher than that of the amorphous region on the first semiconductor layer side in the second semiconductor layer, and the proportion of the amorphous region is higher than that of the single crystal region on the third semiconductor layer side.


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