3-dimensional memory device having peripheral circuit devices having source/drain contacts with different spacings

Abstract

A memory device includes a cell region including a channel region extending to be perpendicular to an upper surface of a substrate, a plurality of gate electrode layers stacked on the substrate adjacently to the channel region, a peripheral circuit region including a first active region disposed in the vicinity of the cell region, a second active region having an area larger than an area of the first active region, a plurality of first contacts connected to the first active region, and a plurality of second contacts connected to the second active region. A distance between the plurality of first contacts is less than that between the plurality of second contacts.