The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Jun. 25, 2013
Asml Netherlands B.v., Veldhoven, NL;
Alexander Petrus Hilbers, Velsen-Noord, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The present invention provides a method for containing unwanted electric charge that accumulates on the surface of the dielectric of an electrostatic clamp. One source of such charge is found to be from the triple points where conductive interconnect linesand conductive burl coatingscontact the surface of the dielectric. These triple points are potted by means of an insulating materialsuch that any emitted electrons are contained. While the interconnect linesare completely covered, in the case of the conductive burl coatingalthough the burlcannot be completely covered by the insulating material, the triple point is moved to a region where there is no or at least only low electric field whereby there is no or only little emission of electrons.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile