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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9449848 B1

PDFFull Text
Expired
Date of Patent:
Sep. 20, 2016

Filed:

Aug. 29, 2013

Manufacturing method for semiconductor device, annealing device, and annealing method

Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Kiyotaka Miyano, Tokyo, JP;

Wakana Kai, Kanagawa, JP;

Tatsunori Isogai, Mie, JP;

Tomonori Aoyama, Mie, JP;

Assignee:

KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;

Attorney:

Patterson & Sheridan, LLP

Primary Examiner:

Pamela E Perkins

Int. Cl.
CPC ...
H01L 21/324 (2006.01); H05B 6/80 (2006.01); H01L 21/67 (2006.01); H01L 29/66 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 21/324 (2013.01); H01L 21/67103 (2013.01); H01L 29/66795 (2013.01); H05B 6/80 (2013.01); H05B 6/806 (2013.01); H01L 21/823821 (2013.01);
Abstract

According to one embodiment, the manufacturing method for the semiconductor device according to the embodiment includes carrying out ion implantation to the semiconductor layer and forming an amorphous layer on the surface of the semiconductor layer, and a heat treatment process using microwave annealing at a temperature higher than or equal to 200° C. and lower than or equal to 700° C. and single crystallizes the amorphous layer.

Find Patent Forward Citations

Miyano, Kiyotaka. (2016). Manufacturing method for semiconductor device, annealing device, and annealing method (U.S. Patent No. 9449848). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9449848

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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