The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Oct. 22, 2014
Jeol Ltd., Tokyo, JP;
Tatsuo Naruse, Tokyo, JP;
JEOL Ltd., Tokyo, JP;
Abstract
A charged particle beam instrument is offered which can introduce cooled samples easily into a sample chamber. The charged particle beam instrument () of the present invention has: a sample container () that accommodates samples (S) and a refrigerant () for cooling the samples (S); an evacuated sample chamber (); a sample exchange chamber () connected with the sample chamber (); a partition valve () disposed between the sample exchange chamber () and the sample container (); and vacuum pumping equipment () for evacuating the sample container (). The sample container () can be connected with the sample exchange chamber () via the partition valve (). The sample container () is evacuated by the vacuum pumping equipment () while the partition valve () is closed.