The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Nov. 19, 2014
Applicant:
Sandia Corporation, Albuquerque, NM (US);
Inventors:
David Bruce Burckel, Albuquerque, NM (US);
Gregory A. Ten Eyck, Albuquerque, NM (US);
Assignee:
Sandia Corporation, Albquerque, NM (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); G02B 3/00 (2006.01); H01P 11/00 (2006.01); B82Y 40/00 (2011.01); C23C 14/24 (2006.01); C23C 14/22 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
G02B 3/0012 (2013.01); B82Y 40/00 (2013.01); C23C 14/042 (2013.01); C23C 14/22 (2013.01); C23C 14/225 (2013.01); C23C 14/24 (2013.01); H01L 51/001 (2013.01); H01L 51/0008 (2013.01); H01L 51/0011 (2013.01); H01P 11/008 (2013.01);
Abstract
The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.