The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2016
Filed:
Aug. 24, 2011
Masaru Hori, Nagoya, JP;
Hiroshi Amano, Nagoya, JP;
Hiroyuki Kano, Miyoshi, JP;
Shoji Den, Yokohama, JP;
Koji Yamakawa, Yokohama, JP;
Masaru Hori, Nagoya, JP;
Hiroshi Amano, Nagoya, JP;
Hiroyuki Kano, Miyoshi, JP;
Shoji Den, Yokohama, JP;
Koji Yamakawa, Yokohama, JP;
National University Corporation Nagoya University, Nagoya-shi, Aichi, JP;
NU ECO Engineering Co., Ltd., Miyoshi-shi, Aichi, JP;
Katagiri Engineering Co., Ltd., Yokohama-shi, Kanagawa, JP;
Abstract
A radical generator includes a supply tube, a plasma-generating tube, a coil winding about an outer circumference of the plasma-generating tube, for generating an inductively coupled plasma in the plasma-generating tube, an electrode for generating a capacitively coupled plasma in the plasma-generating tube and adding the capacitively coupled plasma to the inductively coupled plasma, and a parasitic-plasma-preventing tube including a dielectric material which extends from a bottom of the plasma-generating tube to an opening of the supply tube in a space between the bottom and the opening, and a tip part thereof is inserted into the supply tube to cover an inner wall of the supply tube for preventing a generation of a parasitic plasma between the electrode and the inner wall of the supply tube.